ON THE MECHANISM OF SILICON NITRIDATION IN THE PRESENCE OF ZrO2
نویسندگان
چکیده
The present work addresses the interaction between Si and ZrO which may occur during the nitridation stage of silicon and can affect t8e final reaction products. Using the thermoanalytical methods combined with Xray diffractometry it has been shown that the Si, parallel to the nitride formation, disproportionates in the presence of Zr02 forming ZrSi04 and ZrSi2-x according to 2Zr02 + (3-x)Si > ZrSi04 + ZrSi 2-x It is shown further that these reaction products form ZrN, Zr 0 N and Si N 0 2 2 during the nitridation. ZrO thus affects the nitridation so lh&! less desir2 able by-products are introduced (i.e. ZrN, Zr 0 N ) which may cause a decre7 11 2 ased oxidation resistance of the sintered body.
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تاریخ انتشار 2017